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Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis

  • Book
  • © 2002

Overview

Editors:
  1. Alvin W. Czanderna

    1. National Renewable Energy Laboratory, Golden

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    You can also search for this editor in PubMed   Google Scholar

  2. Theodore E. Madey

    1. Rutgers, The State University of New Jersey, Piscataway

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    You can also search for this editor in PubMed   Google Scholar

  3. Cedric J. Powell

    1. National Institute of Standards and Technology, Gaithersburg

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Part of the book series: Methods of Surface Characterization (MOSC, volume 5)

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Table of contents (5 chapters)

  1. Front Matter

    Pages i-xix
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  2. Photon Beam Damage and Charging at Solid Surfaces

    • John H. Thomas III
    Pages 1-37

  3. Electron Beam Damage at Solid Surfaces

    • Carlo G. Pantano, Andrew S. D’Souza, Alan M. Then
    Pages 39-96

  4. Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling

    • L. S. Dake, D. E. King, J. R. Pitts, A. W. Czanderna
    Pages 97-274

  5. Characterization of Surface Topography

    • T. V. Vorburger, J. A. Dagata, G. Wilkening, K. Iizuka
    Pages 275-354

  6. Depth Profiling Using Sputtering Methods

    • H. W. Werner, P. R. Boudewijn
    Pages 355-419

  7. Back Matter

    Pages 421-430
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Keywords

About this book

Many books are available that detail the basic principles of the different methods of surface characterization. On the other hand, the scientific literature provides a resource of how individual pieces of research are conducted by particular labo- tories. Between these two extremes the literature is thin but it is here that the present volume comfortably sits. Both the newcomer and the more mature scientist will find in these chapters a wealth of detail as well as advice and general guidance of the principal phenomena relevant to the study of real samples. In the analysis of samples, practical analysts have fairly simple models of how everything works. Superimposed on this ideal world is an understanding of how the parameters of the measurement method, the instrumentation, and the char- teristics of the sample distort this ideal world into something less precise, less controlled, and less understood. The guidance given in these chapters allows the scientist to understand how to obtain the most precise and understood measu- ments that are currently possible and, where there are inevitable problems, to have clear guidance as the extent of the problem and its likely behavior.

Editors and Affiliations

  • National Renewable Energy Laboratory, Golden

    Alvin W. Czanderna

  • Rutgers, The State University of New Jersey, Piscataway

    Theodore E. Madey

  • National Institute of Standards and Technology, Gaithersburg

    Cedric J. Powell

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