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Precision Sensors, Actuators and Systems

  • Book
  • © 1992

Overview

Part of the book series: Solid Mechanics and Its Applications (SMIA, volume 17)

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Table of contents (11 chapters)

Keywords

About this book

Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life.
This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc.
These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.

Editors and Affiliations

  • University of Kentucky, Lexington, USA

    H. S. Tzou

  • Nagoya University, Nagoya, Japan

    T. Fukuda

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