Overview
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Table of contents (51 papers)
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MEMS Fabrication Techniques
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State-of-the-Art of Tribology: Macroscale Processes
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State-of-the-Art of Tribology: Micro-to Nanoscale Processes
Keywords
About this book
Editors and Affiliations
Bibliographic Information
Book Title: Tribology Issues and Opportunities in MEMS
Book Subtitle: Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997
Editors: Bharat Bhushan
DOI: https://doi.org/10.1007/978-94-011-5050-7
Publisher: Springer Dordrecht
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media Dordrecht 1998
Hardcover ISBN: 978-0-7923-5024-8Published: 30 June 1998
Softcover ISBN: 978-94-010-6121-6Published: 05 November 2012
eBook ISBN: 978-94-011-5050-7Published: 06 December 2012
Edition Number: 1
Number of Pages: XIV, 655
Topics: Classical Mechanics, Characterization and Evaluation of Materials, Inorganic Chemistry, Electrical Engineering, Manufacturing, Machines, Tools, Processes