Tribology Issues and Opportunities in MEMS

1. Front Matter

   Pages i-xiv

   PDF

2. MEMS Fabrication Techniques

   1. MEMS R&D in Europe

      • L. Hermans

      Pages 1-16

   2. Integrated MEMS in Conventional CMOS

      • Gary K. Fedder

      Pages 17-29

   3. Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review

      • Marc Madou

      Pages 31-51

   4. Microfabrication Technologies for High Performance Microactuators

      • F. Michel, W. Ehrfeld

      Pages 53-72

   5. Surface Characterization of Non-Lithographic Micromachining

      • C. R. Friedrich, R. O. Warrington

      Pages 73-84

3. MEMS Applications and Tribology Issues

   1. Biosensors and Microfluidic Systems

      • P. J. Hesketh, S. Zivanovic, S. Pak, B. Ilic, L. St. Clair, B. Shih et al.

      Pages 85-94

   2. Power MEMS Materials and Structures

      • S. M. Spearing, K. S. Chen

      Pages 95-107

   3. MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization

      • R. E. Sulouff

      Pages 109-120

   4. New Technology and Applications at Lucas NovaSensor

      • Kirt R. Williams

      Pages 121-134

4. State-of-the-Art of Tribology: Macroscale Processes

   1. Rough Surface Characterization

      • J. H. Tripp

      Pages 135-148

   2. Frictional Instabilities

      • N. S. Eiss

      Pages 149-156

   3. Wear of Ceramics and Metals

      • T. E. Fischer

      Pages 157-164

   4. Mechanics of Wear: From Conventional Components to MEMS

      • F. J. Franklin, A. Kapoor

      Pages 165-174

   5. Rheological Modeling of Thin Film Lubrication

      • John A. Tichy

      Pages 175-183

   6. Surface Roughness Induced Effects in Hydrodynamic Lubrication

      • Kristian Tønder

      Pages 185-206

   7. Transition from Elastohydrodynamic to Partial Lubrication

      • Hsing-Sen S. Hsiao, Bernard J. Hamrock, Shashi K. Sharma, John H. Tripp

      Pages 207-228

5. State-of-the-Art of Tribology: Micro-to Nanoscale Processes

   1. Micro/Nanotribology: State of the Art and Its Applications

      • Bharat Bhushan

      Pages 229-246

   2. Pulsed Force Mode: A new method for characterizing thin silane films by adhesive force measurements

      • S. Hild, U. Krotil, O. Marti

      Pages 247-260

   3. Formation of Nanometer-Scale Contacts to Viscoelastic Materials

      • K. J. Wahl, W. N. Unertl

      Pages 261-271

Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

• Motor
• Potential
• Sensor
• integrated circuit
• machining
• manufacturing
• materials science
• microelectromechanical system (MEMS)

• Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, USA

  Bharat Bhushan

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