Overview
- Editors:
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A. Berg
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MESA Research Institute, University of Twente, The Netherlands
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P. Bergveld
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MESA Research Institute, University of Twente, The Netherlands
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Table of contents (51 papers)
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- Michiel de Bakker, Piet W. Verbeek, Gijs K. Steenvoorden
Pages 11-16
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- Gleb Vdovin, Serhat Sakarya
Pages 17-20
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- Ronald J. W. T. Tangelder, Hans G. Kerkhoff
Pages 21-26
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- Stoyan N. Nihtianov, Gerard C. M. Meijer
Pages 27-32
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- R. Berger, H. P. Lang, C. Andreoli, J. Brügger, M. Despont, P. Vettiger et al.
Pages 33-42
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- B. G. de Grooth, A. Agronskaya, Bennink, S. J. T. van Noort, K. O. van der Werf, J. Greve
Pages 43-48
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- G. J. Veldhuis, P. V. Lambeck
Pages 49-53
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- U. A. Dauderstädt, P. J. French, P. M. Sarro
Pages 55-60
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- J. Flokstra, E. Bartolomé, G. K. van Ancum, M. J. van Duuren, H. Rogalla
Pages 61-66
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- Yolanda Fintschenko, Albert van den Berg, Vincent Spiering, Gert-Jan Burger, Johannes van der Moolen
Pages 77-84
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- R. E. Oosterbroek, J. W. Berenschot, S. Schlautmann, T. S. J. Lammerink, A. van den Berg, M. C. Elwenspoek
Pages 85-90
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- Sebastian Böhm, Dorota Pijanowska, Wouter Olthuis, Piet Bergveld
Pages 91-95
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- Martijn M. G. Antonisse, Ronny J. W. Lugtenberg, Alina Ion, Richard J. M. Egberink, Bianca H. M. Snellink-Ruël, Johan F. J. Engbersen et al.
Pages 97-105
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- Niels J. van der Veen, Richard J. M. Egberink, Johan F. J. Engbersen, David N. Reinhoudt
Pages 107-110
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- Geert Besselink, Gijs Dirks, Wouter Olthuis, Piet Bergveld
Pages 111-115
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- Hans C. van Leeuwen, Peter C. van der Vliet, Richard B. M. Schasfoort
Pages 117-121
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About this book
In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electronics, allowed for new transduction principles, and enabled the realization of micromechanical structures for sensing or actuation. Such micromechanical structures are particularly well-suited to realize complex microsystems that improve the performance of individual sensors. Currently, a variety of sensor areas ranging from optical to magnetic and from micromechanical to (bio)chemical sensors has reached a high level of sophistication.
In this MESA Monograph the proceedings of the Dutch Sensor Conference, an initiative of the Technology Foundation (STW), held at the University of Twente on March 2-3, 1998, are compiled. It comprises all the oral and poster contributions of the conference, and gives an excellent overview of the state of the art of Dutch sensor research and development. Apart from Dutch work, the contributions of two external invited experts from Switzerland are included.
Editors and Affiliations
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MESA Research Institute, University of Twente, The Netherlands
A. Berg,
P. Bergveld