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Table of contents (37 chapters)
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Overview
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Sputtering
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Defects and Disorder
Keywords
Editors and Affiliations
Bibliographic Information
Book Title: Materials Modification by High-fluence Ion Beams
Editors: Roger Kelly, M. Fernanda Silva
Series Title: NATO Science Series E:
DOI: https://doi.org/10.1007/978-94-009-1267-0
Publisher: Springer Dordrecht
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eBook Packages: Springer Book Archive
Copyright Information: Kluwer Academic Publishers 1989
Hardcover ISBN: 978-0-7923-0035-9Due: 31 December 1988
Softcover ISBN: 978-94-010-7063-8Published: 26 September 2011
eBook ISBN: 978-94-009-1267-0Published: 06 December 2012
Series ISSN: 0168-132X
Edition Number: 1
Number of Pages: 606
Topics: Characterization and Evaluation of Materials, Electrical Engineering, Surfaces and Interfaces, Thin Films