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Sensor Technology 2001

Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14–15 May, 2001

  • Conference proceedings
  • © 2001

Overview

Editors:
  1. Miko Elwenspoek

    1. MESA+ Research Institute, University of Twente, Enschede, The Netherlands

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Table of contents (33 papers)

  1. Front Matter

    Pages i-xii
    Download chapter PDF

  2. Measurement System for Biochemical Analysis Based on Capillary Electrophoresis and Microscale Conductivity Detection

    • F. Laugere, A. Berthold, R. M. Guijt, E. Baltussen, J. Bastemeijer, P. M. Sarro et al.
    Pages 1-6

  3. Electro-Osmotic Flow Control in Microfluidics Systems

    • R. E. Oosterbroek, M. H. Goedbloed, A. Trautmann, N. J. van der Veen, S. Schlautmann, J. W. Berenschot et al.
    Pages 7-12

  4. Flow sensing using the temperature distribution along a heated microbeam

    • J. J. van Baar, R. J. Wiegerink, G. J. M. Krijnen, T. S. J. Lammerink, M. C. Elwenspoek
    Pages 13-18

  5. Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller

    • Theo S. J. Lammerink, Remco J. Wiegerink, Miko C. Elwenspoek
    Pages 19-24

  6. Technology for Spatial Light Modulators Based on Reflective Silicon Structures

    • S. Sakarya, G. Vdovin, P. M. Sarro
    Pages 25-30

  7. Building of a Highly Sensitive Two-Channel Integrated Optical Young Interferometer as the First Step Towards Constructing an Integrated Multichannel Interferometer Immunosensor

    • A. Ymeti, J. S. Kanger, R. Wijn, P. V. Lambeck, J. Greve
    Pages 31-36

  8. High Speed Integrated CMOS Wavefront Sensor

    • D. W. de Lima Monteiro, G. Vdovin
    Pages 37-42

  9. Automotive Sensor Development: Success Guaranteed?

    • A. J. Kölling
    Pages 43-45

  10. Study on the Behaviour of Various Substrate Geometries for Use As Passive Heat Sink

    • D. D. L. Wijngaards, G. de Graaf, S. H. Kong, R. F. Wolffenbuttel
    Pages 47-52

  11. Transfer Mould Packaging for Sensors

    • Andre Bossche, Carmen V. B. Cotofana, Jeff. R. Mollinger, Peter Keukens
    Pages 53-58

  12. Inexpensive MEMS Packaging

    • R. Kazinczi, J. R. Mollinger, A. Bossche
    Pages 59-64

  13. Low-Cost System to Determinate the X-Y Position in a Resistive Touch-Screen

    • R. N. Aguilar, G. C. M. Meijer
    Pages 65-69

  14. High Capacity Silicon Load Cells

    • Remco J. Wiegerink, Robert A. F. Zwijze, Gijs J. M. Krijnen, Miko C. Elwenspoek
    Pages 71-76

  15. Thermopile Design for a CMOS Wind-Sensor

    • Kofi A. A. Makinwa, Svetla P. Matova, Johan H. Huijsing
    Pages 77-82

  16. Investigation of Relative Humidity Sensors Based on Porous Silicon, Porous Polysilicon and Porous Silicon Carbide

    • E. J. Connolly, G. M. O’Halloran, P. M. Sarro, P. J. French
    Pages 83-88

  17. Limitations and Complementary Value of Cryogenic SF6-O2 and Bosch Plasma Etch Process for Silicon Micromachining

    • M. A. Blauw, G. Craciun, E. van der Drift, P. J. French
    Pages 89-94

  18. Fabrication of Mechancial Structures Using Macro-Porous Silicon

    • H. Ohji, P. J. French, S. Izuo, K. Tsutsumi
    Pages 95-100

  19. Fine Tuning the Surface Roughness of Powder Blasted Glass Surfaces

    • H. Wensink, S. Schlautmann, M. H. Goedbloed, M. C. El Wenspoek
    Pages 101-106

  20. On the Feasibility of Using Antifuses as Low-Power Heating / Detecting Elements in Pellistor-Type Gas Sensors

    • A. Y. Kovalgin, J. Holleman, A. van den Berg
    Pages 107-112
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Editors and Affiliations

  • MESA+ Research Institute, University of Twente, Enschede, The Netherlands

    Miko Elwenspoek

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