Skip to main content
SpringerLink
Log in

Large Scale Integrated Circuits Technology: State of the Art and Prospects

Proceedings of the NATO Advanced Study Institute on “Large Scale Integrated Circuits Technology: State of the Art and Prospects”, Erice, Italy, July 15–27, 1981

  • Conference proceedings
  • © 1982

Overview

Editors:
  1. Leo Esaki

    1. IBM T.J. Watson Research Center, Yorktown Heights, USA

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  2. Giovanni Soncini

    1. CNR-Lamel, Bologna, Italy

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

Part of the book series: NATO Science Series E: (NSSE, volume 55)

This is a preview of subscription content, log in via an institution to check access.

Access this book

Log in via an institution
eBook USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Licence this eBook for your library

Institutional subscriptions

Table of contents (23 papers)

  1. Front Matter

    Pages I-VIII
    Download chapter PDF

  2. Overview

    1. Front Matter

      Pages 1-1
      Download chapter PDF

    2. Semiconductor Devices and the Role of Physics in their Development

      • L. Esaki
      Pages 3-16

    3. LSI: Prospects and Problems

      • Robert W. Keyes
      Pages 17-30

  3. Silicon Technology

    1. Front Matter

      Pages 31-31
      Download chapter PDF

    2. Silicon Crystals for Large Scale Integrated Circuits

      • B. O. Kolbesen
      Pages 33-69

    3. Structural Techniques for Bulk Defects Characterization

      • C. Donolato
      Pages 70-86

  4. Processing

    1. Front Matter

      Pages 87-87
      Download chapter PDF

    2. Planar Processing: Silicon Oxidation

      • G. J. Declerck
      Pages 89-111

    3. Planar Processing: Diffusion

      • G. J. Declerck
      Pages 112-131

    4. Ion Implantation

      • Heiner Ryssel
      Pages 132-199

    5. Silicon Epitaxy

      • D. A. Antoniadis
      Pages 200-222

    6. Computer Simulation of Complete IC Fabrication Process

      • D. A. Antoniadis
      Pages 223-253

    7. Beam Processing Techniques Applied to Crystal Silicon Substrates

      • Giovanni Soncini
      Pages 254-280

    8. Lithography Systems for VLSI

      • A. N. Broers
      Pages 281-311

  5. Bipolar Devices

    1. Front Matter

      Pages 313-313
      Download chapter PDF

    2. Bipolar Linear Integrated Circuits

      • Franco Bertotti, Bruno Murari
      Pages 315-349

    3. Bipolar Digital Circuits

      • W. Holt
      Pages 350-372

    4. Advanced Bipolar Devices and Related Problems

      • K. Kimura, T. Takahashi
      Pages 373-395

  6. MOS Devices

    1. Front Matter

      Pages 397-397
      Download chapter PDF
Back to top

Keywords

About this book

A NATO Advanced Study Institute on "Large Scale Integrated Circuits Technology: State of the Art and Prospects" was held at Ettore Majorana Centre for Scientific Culture, Erice (Italy) on July 15-27, 1981, the first course of the International School of Solid-State Device Research. This volume contains the School Proceedings: fundamentals as well as up-to-date information on each subject presented by qualified authors. The material covered in this volume has been arranged in self-consistent chapters. Therefore, the Proceedings may be used as a suitable textbook or authoritative review for research workers and advanced students in the relevant field. The nascent information society is based on advanced technologies which will revolutionize human abilities to manipulate and communicate information. One of the most important underpinnings for developing such an information society lies in innovations in semiconductor microelectronics. Such innova­ tions, indeed, are dramatically reducing the cost of transmitting, storing, and processing information with improved performance, ushering in an era charac­ terized by large scale integration -the subject of this book.

Editors and Affiliations

  • IBM T.J. Watson Research Center, Yorktown Heights, USA

    Leo Esaki

  • CNR-Lamel, Bologna, Italy

    Giovanni Soncini

Bibliographic Information

  • Book Title: Large Scale Integrated Circuits Technology: State of the Art and Prospects

  • Book Subtitle: Proceedings of the NATO Advanced Study Institute on “Large Scale Integrated Circuits Technology: State of the Art and Prospects”, Erice, Italy, July 15–27, 1981

  • Editors: Leo Esaki, Giovanni Soncini

  • Series Title: NATO Science Series E:

  • DOI: https://doi.org/10.1007/978-94-009-7645-0

  • Publisher: Springer Dordrecht

  • eBook Packages: Springer Book Archive

  • Copyright Information: Martinus Nijhoff Publishers, The Hague 1982

  • Hardcover ISBN: 978-90-247-2725-4Due: 31 October 1982

  • Softcover ISBN: 978-94-009-7647-4Published: 14 October 2011

  • eBook ISBN: 978-94-009-7645-0Published: 06 December 2012

  • Series ISSN: 0168-132X

  • Edition Number: 1

  • Number of Pages: 784

  • Topics: Circuits and Systems, Electrical Engineering

Publish with us

Policies and ethics

Back to top

Search

Navigation