Overview
- Provides a clear, graduate-level introduction to plasma physics starting from the basic concepts
- Includes 100 illustrations and 45 fully resolved problems
- Presents an original and generally applicable approach to energy balance in plasma discharges
- An ideal compendium for those working with plasma discharges used in laboratories and industries
- Includes supplementary material: sn.pub/extras
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Table of contents (4 chapters)
Keywords
- Ambipolar diffusion regime
- Collisions in low-temperature plasmas
- Electron-cyclotron-resonance discharge
- Industrial applications of plasma discharges
- Introduction to cold plasmas
- Modeling of HF discharges
- Plasma discharges in the microelectronic industry
- Principles of plasma science and technology
- Textbook on plasma physics
- Wall-plasma interface
- fluid- and aerodynamics
About this book
This text is an introduction to the physics of collisional plasmas, as opposed to plasmas in space. It is intended for graduate students in physics and engineering . The first chapter introduces with progressively increasing detail, the fundamental concepts of plasma physic. The motion of individual charged particles in various configurations of electric and magnetic fields is detailed in the second chapter while the third chapter considers the collective motion of the plasma particles described according to a hydrodynamic model. The fourth chapter is most original in that it introduces a general approach to energy balance, valid for all types of discharges comprising direct current(DC) and high frequency (HF) discharges, including an applied static magnetic field. The basic concepts required in this fourth chapter have been progressively introduced in the previous chapters.
The text is enriched with approx. 100 figures, and alphabetical index and 45 fully resolved problems. Mathematical and physical appendices provide complementary information or allow to go deeper in a given subject.
Authors and Affiliations
About the authors
Jacques Pelletier is Emeritus Research Director (CNRS) in the Laboratory of Subatomic Physics and Cosmology, Grenoble (France). He designed several generations of plasma-source technologies based on the concept of distributed elementary microwave-plasma sources. He currently works on the design of low-energy plasmas for lighting. He is co-inventor in over 40 patents.
Both authors contributed to create the International Laboratory on Plasma Applications and Technologies (LITAP) with research groups from France and Québec working on different aspects of low pressure microwave plasma technologies and their application to certain domains (biology, thin films, etching).
They have taught at undergraduate, graduate and postgraduate levels. Through this book, their experience as teachers and researchers in cooperation with industry is made available to all readers interested in the fascinating domain of plasma.
Bibliographic Information
Book Title: Physics of Collisional Plasmas
Book Subtitle: Introduction to High-Frequency Discharges
Authors: Michel Moisan, Jacques Pelletier
DOI: https://doi.org/10.1007/978-94-007-4558-2
Publisher: Springer Dordrecht
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer Science+Business Media Dordrecht 2012
Hardcover ISBN: 978-94-007-4557-5Published: 19 June 2012
Softcover ISBN: 978-94-017-8416-0Published: 18 July 2014
eBook ISBN: 978-94-007-4558-2Published: 20 June 2012
Edition Number: 1
Number of Pages: XXIV, 480
Topics: Plasma Physics, Manufacturing, Machines, Tools, Processes, Fluid- and Aerodynamics, Electronics and Microelectronics, Instrumentation, Atoms and Molecules in Strong Fields, Laser Matter Interaction, Applied and Technical Physics