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Table of contents (13 chapters)
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Front Matter
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Back Matter
Authors and Affiliations
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Universität Dortmund, Deutschland
Ulrich Hilleringmann
Bibliographic Information
Book Title: Silizium-Halbleitertechnologie
Authors: Ulrich Hilleringmann
Series Title: Teubner Studienbücher Technik
DOI: https://doi.org/10.1007/978-3-663-05853-3
Publisher: Vieweg+Teubner Verlag Wiesbaden
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eBook Packages: Springer Book Archive
Copyright Information: Springer Fachmedien Wiesbaden 1996
Softcover ISBN: 978-3-519-00149-2Published: 01 September 1995
eBook ISBN: 978-3-663-05853-3Published: 09 March 2013
Edition Number: 1
Number of Pages: XI, 280
Number of Illustrations: 177 b/w illustrations
Topics: Engineering, general