Tetrahedrally Bonded Amorphous Carbon Films I

1. Front Matter

   Pages i-xxxii

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2. Carbon Materials and Coatings

   1. Front Matter

      Pages 1-1

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   2. Carbon

      • Bernd Schultrich

      Pages 3-40

   3. Diamond Films

      • Bernd Schultrich

      Pages 41-83

   4. Nanodiamond Films

      • Bernd Schultrich

      Pages 85-104

   5. Amorphous Carbon Films

      • Bernd Schultrich

      Pages 105-110

   6. Hydrogenated Amorphous Carbon Films (a-C:H)

      • Bernd Schultrich

      Pages 111-192

3. Structural Development of ta-C Films

   1. Front Matter

      Pages 193-193

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   2. Structure of Amorphous Carbon

      • Bernd Schultrich

      Pages 195-272

   3. Influence of Deposition Conditions

      • Bernd Schultrich

      Pages 273-298

   4. Growth of ta-C Films

      • Bernd Schultrich

      Pages 299-370

4. Vacuum Arc Deposition of Carbon Films

   1. Front Matter

      Pages 371-371

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   2. Vacuum Arc Discharges with Carbon Cathodes

      • Bernd Schultrich

      Pages 373-452

   3. Methods of Vacuum Arc Deposition of ta-C Films

      • Bernd Schultrich

      Pages 453-491

   4. Vacuum Arc with Particle Filtering

      • Bernd Schultrich

      Pages 493-526

   5. Special Arc Modes with Reduced Macroparticle Emission

      • Bernd Schultrich

      Pages 527-543

   6. Vacuum Arc Equipment for Mass Production of ta-C Coatings

      • Bernd Schultrich

      Pages 545-581

5. Deposition of ta-C Films by Pulsed Laser and by Sputtering

   1. Front Matter

      Pages 583-583

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   2. Carbon Ablation with ns Lasers

      • Bernd Schultrich

      Pages 585-631

   3. Carbon Film Deposition with ns Lasers

      • Bernd Schultrich

      Pages 633-659

This book presents the status quo of the structure, preparation, properties and applications of tetrahedrally bonded amorphous carbon (ta-C) films and compares them with related film systems.
 
Tetrahedrally bonded amorphous carbon films (ta-C) combine some of the outstanding properties of diamond with the versatility of amorphous materials. The book compares experimental results with the predictions of theoretical analyses, condensing them to practicable rules. It is strictly application oriented, emphasizing the exceptional potential of ta-C for tribological coatings of tools and components.

• Amorphous carbon
• Application of amorphous carbon films
• Structure and properties of carbon films
• Thin carbon films
• Tribology of carbon films

• Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, Germany

  Bernd Schultrich

After some years in the semiconductor industry, Prof. Schultrich (born 1942) worked for more than ten years at the Technical University of Dresden, Dresden in the field of theoretical physics and its application to the micromechanics of solids. He then joined the Central Institute of Solid State Physics and Materials Research of the Academy of Sciences, Dresden working for ten years on fundamental problems of preparation and properties of refractory carbides and nitrides and corresponding composites (hardmetals and cermets) and their application in the tool industry. From 1990 up to his retirement, he headed the PVD (physical vapour deposition) thin film department in the Fraunhofer Institute for Materials and Beam Technology, Dresden. His activities were concentrated on arc and laser-assisted ablation and deposition technologies for industrial applications with the main focus on carbon-based materials. Here his group achieved the breakthrough for the industrial maturity of ta-C (tetrahedral amorphous carbon) films and their preparation.

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