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The Surface Properties of Oxidized Silicon

  • Book
  • © 1967

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Authors:
  1. E. Kooi
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Table of contents (7 chapters)

  1. Front Matter

    Pages i-x
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  2. Introduction

    • E. Kooi
    Pages 1-2

  3. General Review of the Effect of Silicon-Dioxide Coatings on the Surface Properties of Silicon and the Importance of these Coatings in Semiconductor-Device Technology

    • E. Kooi
    Pages 3-51

  4. Diffusion of Phosphorus into Silicon and the Masking Action of Silicon-Dioxide Films

    • E. Kooi
    Pages 52-63

  5. Effects of Low-Temperature Heat Treatments on the Surface Properties of Oxidized Silicon

    • E. Kooi
    Pages 64-80

  6. Influence of X-Ray Irradiations on the Charge Distributions in Metal-Oxide-Silicon Structures

    • E. Kooi
    Pages 81-89

  7. Effects of Ionizing Irradiations on the Properties of Oxide-Covered Silicon Surfaces

    • E. Kooi
    Pages 90-113

  8. The Surface Charge in Oxidized Silicon

    • E. Kooi
    Pages 114-132

  9. Back Matter

    Pages 133-134
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Keywords

Bibliographic Information

  • Book Title: The Surface Properties of Oxidized Silicon

  • Authors: E. Kooi

  • DOI: https://doi.org/10.1007/978-3-662-40210-8

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1967

  • Softcover ISBN: 978-3-662-39204-1Published: 01 January 1967

  • eBook ISBN: 978-3-662-40210-8Published: 21 December 2013

  • Edition Number: 1

  • Number of Pages: X, 134

  • Number of Illustrations: 5 b/w illustrations

  • Topics: Inorganic Chemistry

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