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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Bibliographic Information
Book Title: Technologien für Mikrosysteme
Book Subtitle: Stand und Entwicklung / Integrier Optik — Schichttechniken — Mikromechanik — Halbleitetechniken — Faseroptik
Editors: Magdala Gronau, Joachim Hafkesbrink, Michael Krause, Wilfried Mokwa, Matthias Rospert
Series Title: VDI-Buch
DOI: https://doi.org/10.1007/978-3-662-30512-6
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1993
Softcover ISBN: 978-3-540-62228-4Published: 09 December 1993
eBook ISBN: 978-3-662-30512-6Published: 01 December 2013
Series ISSN: 2512-5281
Series E-ISSN: 2512-529X
Edition Number: 1
Number of Pages: XVII, 222
Number of Illustrations: 37 b/w illustrations