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Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

  • Book
  • © 1985

Overview

Authors:
  1. Ludwig Reimer

    1. Physikalisches Institut, Westfälische Wilhelms-Universität Münster, Münster, Fed. Rep. of Germany

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Part of the book series: Springer Series in Optical Sciences (SSOS, volume 45)

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Table of contents (9 chapters)

  1. Front Matter

    Pages I-XVIII
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  2. Introduction

    • Ludwig Reimer
    Pages 1-12

  3. Electron Optics of a Scanning Electron Microscope

    • Ludwig Reimer
    Pages 13-56

  4. Electron Scattering and Diffusion

    • Ludwig Reimer
    Pages 57-127

  5. Emission of Electrons and X-Ray Quanta

    • Ludwig Reimer
    Pages 128-175

  6. Detectors and Signal Processing

    • Ludwig Reimer
    Pages 176-226

  7. Imaging with Secondary and Backscattered Electrons

    • Ludwig Reimer
    Pages 227-271

  8. Electron-Beam-Induced Current, Cathodoluminescence and Special Techniques

    • Ludwig Reimer
    Pages 272-312

  9. Crystal Structure Analysis by Diffraction

    • Ludwig Reimer
    Pages 313-364

  10. Elemental Analysis and Imaging with X-Rays

    • Ludwig Reimer
    Pages 365-403

  11. Back Matter

    Pages 405-462
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Keywords

About this book

The aim of this book is to outline the physics of image formation, electron­ specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron­ specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec­ tron beam can be blanked at high frequencies for time-resolving exper­ iments and what problems have tobe taken into account when focusing.

Authors and Affiliations

  • Physikalisches Institut, Westfälische Wilhelms-Universität Münster, Münster, Fed. Rep. of Germany

    Ludwig Reimer

Bibliographic Information

  • Book Title: Scanning Electron Microscopy

  • Book Subtitle: Physics of Image Formation and Microanalysis

  • Authors: Ludwig Reimer

  • Series Title: Springer Series in Optical Sciences

  • DOI: https://doi.org/10.1007/978-3-662-13562-4

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1985

  • eBook ISBN: 978-3-662-13562-4Published: 11 November 2013

  • Series ISSN: 0342-4111

  • Series E-ISSN: 1556-1534

  • Edition Number: 1

  • Number of Pages: XVIII, 463

  • Number of Illustrations: 243 b/w illustrations

  • Topics: Solid State Physics, Spectroscopy and Microscopy

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