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Table of contents (15 chapters)
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Front Matter
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Back Matter
Authors and Affiliations
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Photonik-Technologie, Siemens AG, München, München, Deutschland
Gerhard Franz
Bibliographic Information
Book Title: Oberflächentechnologie mit Niederdruckplasmen
Book Subtitle: Beschichten und Strukturieren in der Mikrotechnik
Authors: Gerhard Franz
DOI: https://doi.org/10.1007/978-3-662-08979-8
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1994
eBook ISBN: 978-3-662-08979-8Published: 11 December 2013
Edition Number: 2
Number of Pages: X, 435
Number of Illustrations: 48 b/w illustrations
Additional Information: Ursprünglich veröffentlicht unter dem Titel: Kalte Plasmen - Grundlagen, Erscheinungen, Anwendungen
Topics: Optical and Electronic Materials, Manufacturing, Machines, Tools, Processes, Electronics and Microelectronics, Instrumentation, Surfaces and Interfaces, Thin Films