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Table of contents (8 chapters)
Keywords
Authors and Affiliations
Bibliographic Information
Book Title: Die Kombination von Plasmanitrierung und plasmagestützter Schichtabscheidung aus der Gasphase (PACVD) in einem Verfahrensablauf
Authors: Oliver Morlok
Series Title: IPA-IAO - Forschung und Praxis
DOI: https://doi.org/10.1007/978-3-662-06656-0
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1998
Softcover ISBN: 978-3-540-64567-2Published: 03 June 1998
eBook ISBN: 978-3-662-06656-0Published: 01 July 2013
Edition Number: 1
Number of Pages: 147
Number of Illustrations: 41 b/w illustrations