Mechanical Microsensors

1. Front Matter

   Pages I-X

   PDF

2. Introduction

   • Miko Elwenspoek, Remco Wiegerink

   Pages 1-4

3. MEMS

   • Miko Elwenspoek, Remco Wiegerink

   Pages 5-23

4. Silicon Micromachining

   • Miko Elwenspoek, Remco Wiegerink

   Pages 24-58

5. Mechanics of Beams and Diaphragms

   • Miko Elwenspoek, Remco Wiegerink

   Pages 59-84

6. Principles of Measuring Mechanical Quantities: Transduction of Deformation

   • Miko Elwenspoek, Remco Wiegerink

   Pages 85-96

7. Force and Pressure Sensors

   • Miko Elwenspoek, Remco Wiegerink

   Pages 97-131

8. Acceleration and Angular Rate Sensors

   • Miko Elwenspoek, Remco Wiegerink

   Pages 132-152

9. Flow Sensors

   • Miko Elwenspoek, Remco Wiegerink

   Pages 153-208

10. Resonant Sensors

    • Miko Elwenspoek, Remco Wiegerink

    Pages 209-228

11. Electronic Interfacing

    • Miko Elwenspoek, Remco Wiegerink

    Pages 229-258

12. Packaging

    • Miko Elwenspoek, Remco Wiegerink

    Pages 259-273

13. Back Matter

    Pages 274-295

    PDF

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit­ zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me­ chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa­ tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi­ rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf­ rently being done at the University ofTwente).

• Gauge
• Sensor
• deformation
• design
• friction
• heat transfer
• mechanical engineering
• mechanics
• mechanism
• microelectromechanical system (MEMS)
• scaling
• semiconductor
• sensors
• stress

"Mechanical Microsensors provides a comprehensive description of the various design techniques required for silicon micromachining of sensors. This is a very well written book which has a pleasant balance of mathematical, physics and engineering principles, that make this book suitable for physicists, chemistry, electrical and mechanical engineers."

--SENSOR REVIEW

"Of particular value is the fact that the authors go further than the description of the silicon sensor elements and also present solutions on how to interface these sensors to the surrounding world - electronically in the chapter on 'Electronic Interfacing' as well as physically in the chapter on 'Packaging'. To summarize, this textbook gives a comprehensive overview of mechanical microsensors which is especially well suited for students in courses on mechanical microsensors, but is also valuable for people in research and industry with an interest in this exciting and growing field."

-MEASUREMENT SCIENCE AND TECHNOLOGY

• MESA Research Institute, Twente University of Technology, Enschede, The Netherlands

  Miko Elwenspoek, Remco Wiegerink

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