Authors:
This is the first book in which the tremendous developments of the recent years are recorded
The authors played active roles in the research projects which lead to this new technologies
Revised translation of a well-established German graduate textbook
Includes supplementary material: sn.pub/extras
Part of the book series: Springer Series in Advanced Microelectronics (MICROELECTR., volume 2)
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Table of contents (8 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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semiconductor technology development, Infineon Technologies, Munich, Germany
Dietrich Widmann
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Department of Electrical Engineering and Information Technologies, Munich University of Applied Sciences, Munich, Germany
Hermann Mader
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TELA Versicherungs AG, Munich, Germany
Hans Friedrich
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Technical University Munich, Munich, Germany
Walter Heywang, Rudolf Müller
Bibliographic Information
Book Title: Technology of Integrated Circuits
Authors: Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
Series Title: Springer Series in Advanced Microelectronics
DOI: https://doi.org/10.1007/978-3-662-04160-4
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 2000
Hardcover ISBN: 978-3-540-66199-3Published: 06 July 2000
Softcover ISBN: 978-3-642-08547-5Published: 21 October 2010
eBook ISBN: 978-3-662-04160-4Published: 09 March 2013
Series ISSN: 1437-0387
Series E-ISSN: 2197-6643
Edition Number: 1
Number of Pages: XVIII, 342
Topics: Electronics and Microelectronics, Instrumentation, Optical and Electronic Materials, Industrial Chemistry/Chemical Engineering