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Laser Processing and Chemistry

  • Book
  • © 1996

Overview

Authors:
  1. Dieter Bäuerle

    1. Institut für Angewandte Physik, Johannes-Kepler-Universität Linz, Linz, Austria

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Table of contents (30 chapters)

  1. Front Matter

    Pages I-XX
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  2. Overview and Fundamentals

    1. Front Matter

      Pages 1-1
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    2. Introduction

      • Dieter Bäuerle
      Pages 3-12

    3. Thermal, Photophysical, and Photochemical Processes

      • Dieter Bäuerle
      Pages 13-38

    4. Reaction Kinetics and Transport of Species

      • Dieter Bäuerle
      Pages 39-61

    5. Nucleation and Cluster Formation

      • Dieter Bäuerle
      Pages 62-72

    6. Lasers, Experimental Aspects, Spatial Confinement

      • Dieter Bäuerle
      Pages 73-87

  3. Temperature Distributions and Surface Melting

    1. Front Matter

      Pages 89-89
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    2. General Solutions of the Heat Equation

      • Dieter Bäuerle
      Pages 91-105

    3. Semi-infinite Substrates

      • Dieter Bäuerle
      Pages 106-123

    4. Infinite Slabs

      • Dieter Bäuerle
      Pages 124-131

    5. Non-Uniform Media

      • Dieter Bäuerle
      Pages 132-151

    6. Surface Melting

      • Dieter Bäuerle
      Pages 152-169

  4. Material Removal

    1. Front Matter

      Pages 171-171
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    2. Vaporization, Plasma Formation

      • Dieter Bäuerle
      Pages 173-190

    3. Pulsed-Laser Ablation

      • Dieter Bäuerle
      Pages 191-208

    4. Modelling of Pulsed-Laser Ablation

      • Dieter Bäuerle
      Pages 209-228

    5. Etching of Metals and Insulators

      • Dieter Bäuerle
      Pages 229-250

    6. Etching of Semiconductors

      • Dieter Bäuerle
      Pages 251-277

  5. Material Deposition

    1. Front Matter

      Pages 279-279
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Keywords

About this book

Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.

Authors and Affiliations

  • Institut für Angewandte Physik, Johannes-Kepler-Universität Linz, Linz, Austria

    Dieter Bäuerle

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