Silicon Anodization as a Structuring Technique

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

• electrochemical etching
• microsystems
• FEM simulation
• microstructuring
• sacrificial layer
• electropolishing

• Fraunhofer ISE, Freiburg, Germany

  Alexey Ivanov

Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

Policies and ethics