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Table of contents (6 chapters)
Keywords
About this book
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
​Authors and Affiliations
About the author
Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.
​Bibliographic Information
Book Title: Silicon Anodization as a Structuring Technique
Book Subtitle: Literature Review, Modeling and Experiments
Authors: Alexey Ivanov
DOI: https://doi.org/10.1007/978-3-658-19238-9
Publisher: Springer Vieweg Wiesbaden
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer Fachmedien Wiesbaden GmbH 2018
Softcover ISBN: 978-3-658-19237-2Published: 22 September 2017
eBook ISBN: 978-3-658-19238-9Published: 10 September 2017
Edition Number: 1
Number of Pages: XXIX, 316
Number of Illustrations: 138 b/w illustrations, 3 illustrations in colour
Topics: Nanotechnology and Microengineering, Mathematical and Computational Engineering, Engineering Thermodynamics, Heat and Mass Transfer