Overview
- Publication in the field of natural sciences
- Includes supplementary material: sn.pub/extras
Part of the book series: MatWerk (MW)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
Keywords
About this book
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
Authors and Affiliations
About the author
Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.
Bibliographic Information
Book Title: Temperature Measurement during Millisecond Annealing
Book Subtitle: Ripple Pyrometry for Flash Lamp Annealers
Authors: Denise Reichel
Series Title: MatWerk
DOI: https://doi.org/10.1007/978-3-658-11388-9
Publisher: Springer Wiesbaden
eBook Packages: Biomedical and Life Sciences, Biomedical and Life Sciences (R0)
Copyright Information: Springer Fachmedien Wiesbaden 2015
Softcover ISBN: 978-3-658-11387-2Published: 14 January 2016
eBook ISBN: 978-3-658-11388-9Published: 07 January 2016
Series ISSN: 2522-0756
Series E-ISSN: 2522-0764
Edition Number: 1
Number of Pages: XXV, 112
Number of Illustrations: 77 illustrations in colour
Topics: Solid State Physics, Thermodynamics, Materials Engineering