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Laser-Assisted Microtechnology

  • Book
  • © 1994

Overview

Authors:
  1. Simeon M. Metev

    1. BIAS Bremen Institute of Applied Beam Technology, Bremen, Germany

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  2. Vadim P. Veiko

    1. IFMO Institute of Fine Mechanics and Optics, Sablinskaya 14, Russia

    View author publications

    You can also search for this author in PubMed   Google Scholar

Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 19)

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Table of contents (8 chapters)

  1. Front Matter

    Pages I-XII
    Download chapter PDF

  2. Introduction

    • Simeon M. Metev, Vadim P. Veiko
    Pages 1-5

  3. Laser-Based Equipment for Microtechnology

    • Simeon M. Metev, Vadim P. Veiko
    Pages 6-33

  4. Laser Micromachining of Thin Films

    • Simeon M. Metev, Vadim P. Veiko
    Pages 34-99

  5. Local Laser-Induced Heat Treatment

    • Simeon M. Metev, Vadim P. Veiko
    Pages 100-131

  6. Laser Melting and Microwelding

    • Simeon M. Metev, Vadim P. Veiko
    Pages 132-156

  7. Laser Microshaping

    • Simeon M. Metev, Vadim P. Veiko
    Pages 157-186

  8. Maskless Laser Micropatterning

    • Simeon M. Metev, Vadim P. Veiko
    Pages 187-227

  9. Pulsed Laser-Plasma Deposition of Thin Films, and Film Structures

    • Simeon M. Metev, Vadim P. Veiko
    Pages 228-246

  10. Back Matter

    Pages 247-272
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Keywords

About this book

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

Authors and Affiliations

  • BIAS Bremen Institute of Applied Beam Technology, Bremen, Germany

    Simeon M. Metev

  • IFMO Institute of Fine Mechanics and Optics, Sablinskaya 14, Russia

    Vadim P. Veiko

Bibliographic Information

  • Book Title: Laser-Assisted Microtechnology

  • Authors: Simeon M. Metev, Vadim P. Veiko

  • Series Title: Springer Series in Materials Science

  • DOI: https://doi.org/10.1007/978-3-642-97327-7

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1994

  • eBook ISBN: 978-3-642-97327-7Published: 08 March 2013

  • Series ISSN: 0933-033X

  • Series E-ISSN: 2196-2812

  • Edition Number: 1

  • Number of Pages: X, 240

  • Topics: Electrical Engineering, Condensed Matter Physics

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