Authors:
- Übersicht über die Laser-Anwendungen in der Mikro-
- Nanotechnologie mit praktischen Ergebnissen.
Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 19)
Buy it now
Buying options
Tax calculation will be finalised at checkout
Other ways to access
This is a preview of subscription content, log in via an institution to check for access.
Table of contents (8 chapters)
-
Front Matter
-
Back Matter
About this book
Authors and Affiliations
-
BIAS Bremen Institute of Applied Beam Technology, Bremen, Germany
Simeon M. Metev
-
IFMO Institute of Fine Mechanics and Optics, St. Petersburg, Russia
Vadim P. Veiko
Bibliographic Information
Book Title: Laser-Assisted Microtechnology
Authors: Simeon M. Metev, Vadim P. Veiko
Series Title: Springer Series in Materials Science
DOI: https://doi.org/10.1007/978-3-642-87271-6
Publisher: Springer Berlin, Heidelberg
-
eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1998
Softcover ISBN: 978-3-642-87273-0Published: 07 July 2012
eBook ISBN: 978-3-642-87271-6Published: 09 March 2013
Series ISSN: 0933-033X
Series E-ISSN: 2196-2812
Edition Number: 2
Number of Pages: XII, 270
Number of Illustrations: 41 b/w illustrations
Topics: Nanotechnology, Manufacturing, Machines, Tools, Processes, Surfaces and Interfaces, Thin Films, Optics, Lasers, Photonics, Optical Devices, Characterization and Evaluation of Materials