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Table of contents (68 papers)
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Front Matter
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Disorder in Ion Implanted Silicon
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Implantation of Boron and Phosphorus into Silicon
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Implantation into Compound Semiconductors
About this book
Bibliographic Information
Book Title: Ion Implantation in Semiconductors
Book Subtitle: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24–28, 1971, Garmisch-Partenkirchen, Bavaria, Germany
Editors: Ingolf Ruge, Jürgen Graul
DOI: https://doi.org/10.1007/978-3-642-80660-5
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag, Berlin · Heidelberg 1971
Softcover ISBN: 978-3-642-80662-9Published: 25 December 2011
eBook ISBN: 978-3-642-80660-5Published: 06 December 2012
Edition Number: 1
Number of Pages: XIV, 508