Overview
- Editors:
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Günther Bauer
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Institut für Halbleiterphysik, Universität Linz, Linz, Austria
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Wolfgang Richter
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Institut für Festkörperphysik, Technische Universität Berlin, Germany
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Table of contents (6 chapters)
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- Günther Bauer, Wolfgang Richter
Pages 1-11
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- Wolfgang Richter, Dietrich Zahn
Pages 12-67
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- Uwe Rossow, Wolfgang Richter
Pages 68-128
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- Norbert Esser, Jean Geurts
Pages 129-202
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- Bernd Harbecke, Bernhard Heinz, Volkmar Offermann, Wolfgang Theiß
Pages 203-286
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- Alois Krost, Günther Bauer, Joachim Woitok
Pages 287-391
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Back Matter
Pages 392-432
About this book
The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor processes. Despite the large potential of techniques based on the interaction of electromagnetic waves with surfaces and epilayers, optical techniques are apparently moving only slowly into this area of technology. One reason for this might be that some prejudices still exist regarding their sensitivity.
Editors and Affiliations
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Institut für Halbleiterphysik, Universität Linz, Linz, Austria
Günther Bauer
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Institut für Festkörperphysik, Technische Universität Berlin, Germany
Wolfgang Richter
