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The Physics and Fabrication of Microstructures and Microdevices

Proceedings of the Winter School Les Houches, France, March 25–April 5, 1986

  • Conference proceedings
  • © 1986

Overview

Editors:
  1. Michael J. Kelly

    1. GEC Research Ltd., Wembley, Middlesex, England

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  2. Claude Weisbuch

    1. Laboratoire Central de Recherches, Thomson-CSF, Orsay, France

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    You can also search for this editor in PubMed   Google Scholar

Part of the book series: Springer Proceedings in Physics (SPPHY, volume 13)

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Table of contents (45 papers)

  1. Front Matter

    Pages I-XI
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  2. Physics and Engineering of Microfabrication

    1. Front Matter

      Pages 1-1
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    2. High Resolution Lithography (Some Comments on Limits and Future Possibilities)

      • A. N. Broers
      Pages 2-14

    3. Submicron Lithography Tools

      • G. Pircher, J. Perrocheau
      Pages 15-35

    4. Electron Beam Nanolithography

      • C. D. W. Wilkinson, S. P. Beaumont
      Pages 36-50

    5. The Spin Coating Process Mechanism

      • A. Weill
      Pages 51-58

    6. Resists Patterning

      • A. Weill
      Pages 59-64

    7. Dry Etching: Concepts, Methods and Applications

      • H. W. Lehmann
      Pages 65-82

    8. Overlayers

      • S. Furukawa
      Pages 83-93

    9. Self-Aligned Growth of Microstructures

      • Y. Pauleau
      Pages 94-108

    10. Laser-Induced Growth of Microstructures

      • Y. Pauleau, G. Auvert
      Pages 109-120

    11. Structural Characterization of Superlattices by X-Ray Diffraction

      • M. Quillec
      Pages 121-135

    12. Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces

      • W. M. Stobbs
      Pages 136-149

    13. Fabrication of Small Structures of Semiconductors and Metals

      • H. G. Craighead
      Pages 150-157

    14. Atomically Controlled Growth in 2, 1 and OD, and Applications

      • H. Watanabe
      Pages 158-165

    15. Microstructure of Organic Mono- and Multilayers

      • H. Möhwald
      Pages 166-172

  3. Physics of Microstructures

    1. Front Matter

      Pages 173-173
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    2. Fundamentals of Low Dimensional Physics

      • M. J. Kelly
      Pages 174-196

    3. Electron States in Semiconductor Microstructures

      • M. Jaros
      Pages 197-209

    4. Quantum Transport Theory for Small-Geometry Structures

      • J. R. Barker
      Pages 210-230
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Keywords

About this book

les Houches This Winter School on "The Physics and Fabrication of Microstructures" originated with a European industrial decision to investigate in some detail the potential of custom-designed microstructures for new devices. Beginning in 1985, GEC and THOMSON started a collaboration on these subjects, supported by an ESPRIT grant from the Commission of the European Com­ munity. To the outside observer of the whole field, it appears clear that the world effort is very largely based in the United States and Japan. It also appears that cooperation and dissemination of results are very well organised outside Europe and act as a major influence on the development of new concepts and devices. In Japan, a main research programme of the Research and Development for Basic Technology for Future Industries is focused on "Future Electron Devices". In Japan and in the United States, many workshops are organised annually in order to bring together the major specialists in industry and academia, allowing fast dissemination of advances and contacts for setting up cooperative efforts.

Editors and Affiliations

  • GEC Research Ltd., Wembley, Middlesex, England

    Michael J. Kelly

  • Laboratoire Central de Recherches, Thomson-CSF, Orsay, France

    Claude Weisbuch

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