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Technologie hochintegrierter Schaltungen

  • Book
  • © 1996

Overview

Authors:
  1. Dietrich Widmann

    1. Bereich Halbleiter, Siemens AG, München/Berlin, Germany

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  2. Hermann Mader

    1. Fachbereich Elektrotechnik der Fachhochschule München, Vorstand im Institut für Technologie- und Wissenstransfer an der FH München, Germany

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  3. Hans Friedrich

    1. TELA Beteiligungsgesellschaft m.b.H., München, Germany

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Part of the book series: Halbleiter-Elektronik (HALBLEITER, volume 19)

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Table of contents (8 chapters)

  1. Front Matter

    Pages I-XX
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  2. Einleitung

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 1-2

  3. Grundzüge der Technologie von Integrierten Schaltungen

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 3-12

  4. Schichttechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 13-100

  5. Lithographie

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 101-180

  6. Ätztechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 181-222

  7. Dotiertechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 223-252

  8. Reinigungstechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 253-267

  9. Prozeßintegration

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 269-349

  10. Back Matter

    Pages 351-366
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Keywords

Authors and Affiliations

  • Bereich Halbleiter, Siemens AG, München/Berlin, Germany

    Dietrich Widmann

  • Fachbereich Elektrotechnik der Fachhochschule München, Vorstand im Institut für Technologie- und Wissenstransfer an der FH München, Germany

    Hermann Mader

  • TELA Beteiligungsgesellschaft m.b.H., München, Germany

    Hans Friedrich

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