Authors:
- The author, in close cooperation with scientists from MPG Stuttgart (Prof. Queisser and Dr. J. Wehr), has extended and updated the treatment that is most important for semiconductor technology
Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 24)
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Table of contents (9 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Telefunken Electronic, Heilbronn, Germany
Klaus Graff
Bibliographic Information
Book Title: Metal Impurities in Silicon-Device Fabrication
Authors: Klaus Graff
Series Title: Springer Series in Materials Science
DOI: https://doi.org/10.1007/978-3-642-57121-3
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 2000
Hardcover ISBN: 978-3-540-64213-8Published: 18 February 2000
Softcover ISBN: 978-3-642-62965-5Published: 21 October 2012
eBook ISBN: 978-3-642-57121-3Published: 07 March 2013
Series ISSN: 0933-033X
Series E-ISSN: 2196-2812
Edition Number: 2
Number of Pages: XV, 270
Topics: Optical and Electronic Materials, Electronics and Microelectronics, Instrumentation, Characterization and Evaluation of Materials