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  • Conference proceedings
  • © 1990

Micro System Technologies 90

1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990

Editors:

  1. Herbert Reichl

    1. Forschungsschwerpunkt Technologie der Mikroperipherik, Technische Universität Berlin, Berlin 10, Germany

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Table of contents (123 papers)

  1. Front Matter

    Pages I-XV
    PDF

  2. Simulation and Design

    1. Front Matter

      Pages 1-1
      PDF

    2. Design of Micro Systems

      2. A Specification Driven Environment for Microsystem Design
        • K. D. Müller-Glaser, H. Rauch, W. Wolz, J. Bortolazzi, C. Kuntzsch, R. Zippelius
        Pages 9-16
      3. Conceptual Design of Micro-Electro-Mechanical Systems
        • Selden Crary, Sridhar Kota
        Pages 17-22
      4. Intelligent CAD for Micro Mechanics
        • Richard Amster, Lee S. Tavrow, Anita M. Flynn
        Pages 23-28

    3. CAD of Optical Devices

      2. Numerical Simulation of Optical Devices
        • C. M. Weinert, H.-P. Nolting
        Pages 38-43
      3. CAD-Tool for Integrated Optic Coupling Gratings
        • V. A. Sychugov, A. V. Tishchenko, M. S. Klimov, O. Parriaux
        Pages 44-51
      4. Simulation on Lateral Detector-Optical Waveguide Coupling
        • K. Kapser, P. P. Deimel
        Pages 52-58

    4. Simulation and Design — Electrical and Thermal Properties

      2. Design Methods for Multichip Systems
        • R. Dümcke
        Pages 71-78
      3. A Fully-Automatic Macromodeling Procedure for the Electrical Simulation of Integrated Circuits
        • C. Turchetti, Zs. M. V.-Kovács, G. Masetti, M. Conti
        Pages 79-84
      5. Waveform Estimation and Hazard Detection in Digital MOS Circuits
        • D. Sass, H. Warmers, E.-H. Horneber
        Pages 91-96
      7. Thermal Analysis of Integrated Circuits
        • H. Rudolph, D. Seitzer
        Pages 103-108

    5. Simulation and Design of Sensors

      1. Design and Simulation of Sensors
        • Henry Baltes
        Pages 117-124
      2. Finite-Element Simulation of Silicon Accelerometers
        • David Moser, Paulo Sigg, Stephane Ansermet, Henry Baltes
        Pages 125-130
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About this book

On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities.
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Keywords

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Editors and Affiliations

  • Forschungsschwerpunkt Technologie der Mikroperipherik, Technische Universität Berlin, Berlin 10, Germany

    Herbert Reichl

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Bibliographic Information

  • Book Title: Micro System Technologies 90

  • Book Subtitle: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990

  • Editors: Herbert Reichl

  • DOI: https://doi.org/10.1007/978-3-642-45678-7

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1990

  • Softcover ISBN: 978-3-642-45680-0Published: 04 December 2014

  • eBook ISBN: 978-3-642-45678-7Published: 06 December 2012

  • Edition Number: 1

  • Number of Pages: XV, 858

  • Topics: Electronics and Microelectronics, Instrumentation, Optics, Lasers, Photonics, Optical Devices, Engineering, general

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Buy it now

eBook USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

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