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Table of contents (9 chapters)
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Front Matter
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Back Matter
About this book
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
Authors and Affiliations
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Research Inst. Micro/Nano, Science & Technology, Shanghai Jiao Tong University, Shanghai, China, People's Republic
Yafei Zhang
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, Research Institute of Micro/Nano S&T, Shanghai Jiao Tong University, Shanghai, China, People's Republic
Da Chen
About the authors
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology. He received his PhD in condensed physics from Lanzhou University of China in 1994. His expertise includes integrated circuits, sensors, field effect transistor construction, solar cells, synthesis and processing of carbon nanotubes, Si nanowires and SiC nanowhiskers, and nanodevices. He has 50 patents and has published 3 books and over 260 papers. He received the National Natural Science Award of China in 2005, and has held more than 20 invited talks at international conferences or institutions. He has also served on the organizing committee for 2 Journals.
Dr. Da Chen was a Ph.D. student in Prof. Yafei Zhang’s research group.
Bibliographic Information
Book Title: Multilayer Integrated Film Bulk Acoustic Resonators
Authors: Yafei Zhang, Da Chen
DOI: https://doi.org/10.1007/978-3-642-31776-7
Publisher: Springer Berlin, Heidelberg
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg 2013
Hardcover ISBN: 978-3-642-31775-0Published: 28 August 2012
Softcover ISBN: 978-3-642-42755-8Published: 20 September 2014
eBook ISBN: 978-3-642-31776-7Published: 28 August 2012
Edition Number: 1
Number of Pages: X, 154
Additional Information: Jointly published with Shanghai Jiao Tong University Press, Shanghai
Topics: Nanotechnology and Microengineering, Surfaces and Interfaces, Thin Films, Solid State Physics