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  • Conference proceedings
  • © 2004

MicroNano Integration

  • In recent years, micro- and nanotechnologies have become key technologies with a significant effect on the development of new products and production methods. Moreover, due to their enormous potential for new applications, micro- and nanotechnologies, in future, will increasingly affect our everyday life, with an impact, comparable to that of the industrial revolution in the 19th century, or the developments in microelectronics in the 20th century
  • In most cases, micro- and nanotechnology go hand in hand with each other: nanotechnology devices need an implementation into a microtechnology environment, working as a linkage to the macroscopic world. On the other hand, microsystems benefit from novel functionality given by nanotechnology components
  • Comprises the most advanced contributions to the International Forum on MicroNano Integration, the first conference focussing on synergy effects provided by the combination and mutual integration of micro- and nanotechnologies. The conference addresses researchers from industry and research institutes and covers a broad range of basic research aspects with a strong focus on technological applications
  • Organised by VDI/VDE-IT and supported by the European Commission, the International Forum on MicroNano Integration will be held on December 3-4, 2003 in Potsdam, Germany
  • Includes supplementary material: sn.pub/extras

Part of the book series: VDI-Buch (VDI-BUCH)

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Table of contents (44 papers)

  1. Front Matter

    Pages i-xv
  2. Innovation Aspects of MicroNano Integration

    1. Front Matter

      Pages 1-1
    2. MicroNano Technology Services Offering New Market Opportunities to Industry

      • P. Salomon, H. van Heeren, L. Paschalidou, A. el-Fatatry
      Pages 19-26
  3. MicroNano Systems and Devices

    1. Front Matter

      Pages 41-41
    2. Performance Analysis of Low Drift Micro-Machined Gyroscopes for Inertial Navigation Systems

      • T. Link, A. Gaißer, M. Braxmaier, I. Simon, A. Schumacher, D. Mintenbeck et al.
      Pages 43-53
    3. Micromixer Module With an Integrated Optical Pressure Gauge

      • T. Pfeifer, Ubaldo Aleriano
      Pages 67-76
    4. Multi-Layer PMMA Microfluidic Systems for Ammonia Detection

      • H. Klank, D. Snakenborg, R. P. H. Nikolajsen, J. P. Kutter
      Pages 77-78
    5. A New Type of Transducer for Gas and Bio-Sensors

      • V. V. Il’chenko, L. G. Il’chenko, A. I. Kravchenko, V. T. Grinchenko
      Pages 81-83
    6. Frequency Changes in the Second Derivative of Currant — Voltage Characteristics of SnO2-Si the Heterostructures During Gas Adsorption for Different Thickness of the Adsorptive Layers

      • V. V. Il’chenko, A. I. Kravchenko, V. M. Telega, V. P. Chehun, L. G. Il’chenko, A. M. Gaskov et al.
      Pages 85-86
  4. MicroNano Devices for Information Technologies

    1. Front Matter

      Pages 87-87
    2. Light Processing with Electrostatically Driven Micro Scanning Mirrors and Micro Mirror Arrays

      • H. Schenk, U. Dauderstädt, P. Dürr, A. Gehner, A. Wolter, H. Lakner
      Pages 89-96
    3. New Combination of SiGe RF Amplifier ICs with High-Q MEMS Components for Wireless Communication Radio Transceivers

      • H.-J. Strobel, W. Bischof, S. Gerlach, H. Schulz, K.-F. Becker, E. Jung et al.
      Pages 97-109
    4. Design and Realisation of an Add-Drop Multiplexer Using Digital Micromirror

      • B. Estibals, H. Camon, C. Pisella, F. Verluise
      Pages 111-112
  5. MicroNano Devices for Biomedical Applications

    1. Front Matter

      Pages 113-113

About this book

In recent years, micro- and nanotechnologies became key technologies, having a significant effect on the development of new products and production technologies, as well as on novel medical diagnosis and treatment methods. Moreover, due to their enormous potential for new applications, micro- and nanotechnologies, in future, will increasingly affect our every days life, with an impact, comparable to that of the industrial revolution in the 19th century, or the developments in microelectronics in the 20th century.

Although, micro- and nanotechnologies, in general, are regarded as two independent disciplines, there is obviously an intense interaction between these two fascinating technologies. The term "MicroNano Integration", in this context, addresses the enormous potential of synergy effects, provided by the combination and mutual integration of micro- and nanotechnological elements.

In order to discuss the integration aspects of micro- and nanotechnologies, the "International Forum on MicroNano Integration", a conference, held in Potsdam, Germany on December 3-4, 2003 brought together researchers from both communities - from industries as well as from scientific institutions. The contributions to this book reflect the discussions during the conference.

Editors and Affiliations

  • VDI/VDE-Technologiezentrum, Informationstechnik GmbH, Teltow, Germany

    Harald Knobloch, Yvette Kaminorz

Bibliographic Information

  • Book Title: MicroNano Integration

  • Editors: Harald Knobloch, Yvette Kaminorz

  • Series Title: VDI-Buch

  • DOI: https://doi.org/10.1007/978-3-642-18727-8

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 2004

  • Hardcover ISBN: 978-3-540-20252-3Published: 27 November 2003

  • Softcover ISBN: 978-3-642-62265-6Published: 05 November 2012

  • eBook ISBN: 978-3-642-18727-8Published: 06 December 2012

  • Series ISSN: 2512-5281

  • Series E-ISSN: 2512-529X

  • Edition Number: 1

  • Number of Pages: XV, 302

  • Topics: Electronics and Microelectronics, Instrumentation

Buy it now

Buying options

eBook USD 39.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access