Silicon

1. Front Matter

   Pages I-XX

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2. Introduction: Silicon in All Its Forms

   1. Introduction: Silicon in All Its Forms

      • J. Chelikowsky

      Pages 1-22

3. “The” Crystalline Bulk Semiconductor Silicon

   1. Front Matter

      Pages 23-23

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   2. Silicon: the Semiconductor Material

      • W. Heywang, K. H. Zaininger

      Pages 25-42

   3. Silicon: an Industrial Adventure

      • E. F. Krimmel

      Pages 43-45

4. Polycrystalline Silicon

   1. Front Matter

      Pages 47-47

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   2. Polycrystalline Silicon Films for Electronic Devices

      • A. Slaoui, P. Siffert

      Pages 49-72

   3. Silicon for Photovoltaics

      • J.-C. Muller, P. Siffert

      Pages 73-92

5. Epitaxy, Films, and Porous Layers

   1. Front Matter

      Pages 93-93

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   2. Films by Molecular-Beam Epitaxy

      • I. Eisele, J. Schulze, E. Kasper

      Pages 95-122

   3. Amorphous Hydrogenated Silicon, a-Si:H

      • W. Fuhs

      Pages 123-137

   4. Silicon-on-Insulator and Porous Silicon

      • J.-P. Colinge

      Pages 139-167

6. Lattice Defects

   1. Front Matter

      Pages 169-169

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   2. Defect Spectroscopy

      • H. G. Grimmeiss

      Pages 171-190

   3. Silicon and Its Vital Role in The Evolution of Scanning Probe Microscopy

      • F. J. Giessibl

      Pages 191-204

7. Doping Silicon

   1. Front Matter

      Pages 205-205

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   2. Defects, Diffusion, Ion Implantation, Recrystallization, and Dielectrics

      • E. F. Krimmel

      Pages 207-230

   3. Neutron Transmutation Doping (NTD) of Silicon

      • M. Schnöller

      Pages 231-241

8. The Roles of Certain Impurities

   1. Front Matter

      Pages 243-243

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   2. Transition Metal Impurities in Silicon

      • T. Heiser

      Pages 245-260

Silicon. The evolution and development of humanity are commonly charac­ terized by the key words Stone Age, Bronze Age, and Iron Age; that is, characterized by materials. Curse or benefit to mankind? The discovery and utilization of semiconductors, particularly of silicon, revolutionized our liv­ ing conditions, society, social life, and maxims in a few years, even more than what happened during all the material-specified periods before. Per­ haps, one day, our descendants will call the period at whose beginning we live the Silicon Age. However, to be correct, the present period is character­ ized of the discovery and development of a whole bunch of new materials and their utilization. These materials are new alloys, ceramics, the plastics and synthetics produced by organic chemistry, composites, biomaterials, and the materials of microelectronics, nanotechnology, and space science. The materi­ als of microelectronics are silicon, other elemental semiconductors, compound semiconductors, and organic semiconductors. With regard to the interdepen­ dences of these materials and their utilization, silicon plays a central role as one of the base materials for electronics. Have we lived in the Silicon Age for only half a century and already jumped into a new age of synthetic organic materials for electronics? We do not know. The first intensive work on silicon started more than 50 years ago. One of the European semiconductor laboratories was installed by the industry in a centuries-old, little countryside castle in Pretzfeld, in the north-east of Bavaria, Germany.

• Application
• Development
• Doping
• Research
• Technology
• defects
• dielectrics
• electronics
• epitaxy
• photovoltaics
• semiconductor
• semiconductor devices
• silicon
• spectroscopy

• General Secretary European Materials Research Society, Strasbourg Cedex 2, France

  P. Siffert

• Siemens Corporate Research Laboratories, München, Germany

  E. F. Krimmel

• J.W. Goethe University, Frankfurt/M, Germany

  E. F. Krimmel

• European Materials Research Society, Strasbourg, France

  E. F. Krimmel

• Pullach/Isartal, Germany

  E. F. Krimmel

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