Overview
- Plasma technologies are inevitable for the microelectronic research and industry – this book explains how!
- First English edition of the successful, corresponding German book
- Includes supplementary material: sn.pub/extras
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Table of contents (14 chapters)
Keywords
About this book
Authors and Affiliations
Bibliographic Information
Book Title: Low Pressure Plasmas and Microstructuring Technology
Authors: Gerhard Franz
DOI: https://doi.org/10.1007/978-3-540-85849-2
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2009
Hardcover ISBN: 978-3-540-85848-5Published: 30 April 2009
Softcover ISBN: 978-3-642-09939-7Published: 19 October 2010
eBook ISBN: 978-3-540-85849-2Published: 09 April 2009
Edition Number: 1
Number of Pages: XXIV, 732
Number of Illustrations: 422 b/w illustrations
Topics: Optical and Electronic Materials, Electronics and Microelectronics, Instrumentation, Surfaces and Interfaces, Thin Films, Atomic/Molecular Structure and Spectra