The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.

Bibliographic Information

Book Title: Low-Energy Ion Irradiation of Solid Surfaces
Authors: Hubert Gnaser
Series Title: Springer Tracts in Modern Physics
DOI: https://doi.org/10.1007/BFb0110693
Publisher: Springer Berlin, Heidelberg
eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1999
Softcover ISBN: 978-3-662-14739-9Published: 20 November 2013
eBook ISBN: 978-3-540-49773-8Published: 06 October 2007
Series ISSN: 0081-3869
Series E-ISSN: 1615-0430
Edition Number: 1
Number of Pages: VIII, 294
Number of Illustrations: 60 b/w illustrations, 9 illustrations in colour
Topics: Surfaces and Interfaces, Thin Films, Characterization and Evaluation of Materials, Atomic, Molecular, Optical and Plasma Physics, Physical Chemistry

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Low-Energy Ion Irradiation of Solid Surfaces

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Table of contents (5 chapters)

Front Matter

Introduction

Interaction of low-energy ions with solids

Composition changes in multicomponent materials

Ion bombardment of crystalline semiconductors

Ionization processes of sputtered atoms and molecules

Back Matter

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