Overview
- State-of-the-art report covering theoretical as well as experimental aspects of sputtering
- Written by leading experts
- Includes supplementary material: sn.pub/extras
Part of the book series: Topics in Applied Physics (TAP, volume 110)
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Table of contents (7 chapters)
Keywords
About this book
Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old, but since then a lot of new and important work has been performed and published in international journals. The planned book brings an overview about all the new results. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all colleagues, who need sputtering yields for physics and/or applied problems. The computational methods for calculating sputtering yields are critically reviewed, Molecular dynamics calculations have not been covered in the previous books on sputtering. The influence of chemical effects on sputtering and the new models developed in the last years for understanding these effects, such as for hydrogen ion bombardment of carbon, are outlined. New developments, such as sputtering by MeV Ions and the mechanisms for understanding the effects are presented. The new results about the angular and energy distributions of sputtered atoms are presented in an extra chapter.
Editors and Affiliations
Bibliographic Information
Book Title: Sputtering by Particle Bombardment
Book Subtitle: Experiments and Computer Calculations from Threshold to MeV Energies
Editors: Rainer Behrisch, Wolfgang Eckstein
Series Title: Topics in Applied Physics
DOI: https://doi.org/10.1007/978-3-540-44502-9
Publisher: Springer Berlin, Heidelberg
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2007
Hardcover ISBN: 978-3-540-44500-5Published: 30 July 2007
Softcover ISBN: 978-3-642-07944-3Published: 23 November 2010
eBook ISBN: 978-3-540-44502-9Published: 26 July 2007
Series ISSN: 0303-4216
Series E-ISSN: 1437-0859
Edition Number: 1
Number of Pages: XVII, 509
Topics: Surfaces and Interfaces, Thin Films, Atoms and Molecules in Strong Fields, Laser Matter Interaction, Plasma Physics