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Transducers ’01 Eurosensors XV

The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany

  • Conference proceedings
  • © 2001

Overview

Editors:
  1. Ernst Obermeier

    1. Department of Electrical Engineering & Computer Science Microsensor & Actuator Technology Secr.TIB 3.1, Berlin University of Technology, Berlin, Germany

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  • Proceedings of a conference with about 1000 participants

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Table of contents (414 papers)

  1. Front Matter

    Pages i-xxxii
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  2. Plenary 1

    1. Front Matter

      Pages 1-1
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    2. Technologies for Microturbomachinery

      • Martin A. Schmidt
      Pages 2-5

    3. MEMS Meets Insects

      • Isao Shimoyama, Kazunori Hoshino, Yoshihiko Ozaki, Satoshi Tamaki, Shoji Takeuchi, Takashi Yasuda
      Pages 6-9

  3. Plenary 2

    1. Front Matter

      Pages 11-11
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    2. Retina Implant — A BioMEMS Challenge

      • J.-Uwe Meyer
      Pages 12-18

    3. MEMS—the view back…and the vistas ahead

      • Richard S. Muller
      Pages 20-23

  4. MEMS Power Generation

    1. Front Matter

      Pages 25-25
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    2. Miniaturized Thermoelectric Generators Based on Poly-Si and Poly-SiGe Surface Micromachining

      • Marc Strasser, Robert Aigner, Martin Franosch, Gerhard Wachutka
      Pages 26-29

    3. A Combustion-Based MEMS Thermoelectric Power Generator

      • Samuel B. Schaevitz, Aleksander J. Franz, Klavs F. Jensen, Martin A. Schmidt
      Pages 30-33

    4. An Integrated Combustor-Thermoelectric Micro Power Generator

      • Chunbo Zhang, Khalil Najafi, Luis P. Bernal, Peter D. Washabaugh
      Pages 34-37

    5. A Laser-micromachined Vibrational to Electrical Power Transducer for Wireless Sensing Systems

      • Neil N. H. Ching, H. Y. Wong, Wen J. Li, Philip H. W. Leong, Zhiyu Wen
      Pages 38-41

    6. Micro Generator Systems

      • Kunihiko Izumida, Naoki Toyota, Masato Yoshimura, Yutatu Muroi, Tomohiko Takenaka, Kyoichi Ikeda
      Pages 42-45

    7. The Modelling of a Piezoelectric Vibration Powered Generator for Microsystems

      • P. Glynne-Jones, S. P. Beeby, E. P. James, N. M. White
      Pages 46-49

  5. Integrated Systems

    1. Front Matter

      Pages 51-51
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    2. A Miniaturized, Autonomous, Programmable Stress Monitoring Device, part of a Dental Prosthesis

      • R. Puers, W. Claes, W. Sansen, Michel De Cooman, J. Duyck, I. Naert
      Pages 52-55

    3. Monolithic Surface-Micromachined Sensor System for High Pressure Applications

      • Hergen Kapels, Robert Aigner, Christian Kolle
      Pages 56-59

    4. Dedicated Interface Electronics for Capacitively-Coupled Conductivity Detection in On-chip Capillary Electrophoresis

      • F. Laugere, G. W. Lubking, J. Bastemeijer, M. J. Vellekoop
      Pages 60-63

    5. Sensitivity Enhancement of MEMS Inertial Sensors Using Negative Springs and Active Control

      • Martin Handtmann, Robert Aigner, Andreas Meckes, Gerhard Wachutka
      Pages 64-67

    6. A Smart Wind-Sensor based on Thermal Sigma-Delta Modulation

      • Kofi A. A. Makinwa, Johan H. Huijsing
      Pages 68-71
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About this book

The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.

Editors and Affiliations

  • Department of Electrical Engineering & Computer Science Microsensor & Actuator Technology Secr.TIB 3.1, Berlin University of Technology, Berlin, Germany

    Ernst Obermeier

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