Skip to main content
SpringerLink
Log in
Book cover
  • Book
  • © 1983

Sputtering by Particle Bombardment II

Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography

Editors:

  1. Rainer Behrish
    View editor publications

    You can also search for this editor in PubMed   Google Scholar

Part of the book series: Topics in Applied Physics (TAP, volume 52)

Sections

Buy it now

Softcover Book USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

This is a preview of subscription content, log in via an institution to check for access.

Table of contents (7 chapters)

  1. Front Matter

    PDF

  2. Introduction and overview

    • Rainer Behrisch
    Pages 1-10

  3. Sputtering of multicomponent materials

    • Gerhard Betz, Gottfried K. Wehner
    Pages 11-90

  4. Chemical sputtering

    • Joachim Roth
    Pages 91-146

  5. Sputtering by electrons and photons

    • Peter C. Townsend
    Pages 147-178

  6. Sputtering of solids with neutrons

    • Rainer Behrisch
    Pages 179-229

  7. Heavy ion sputtering induced surface topography development

    • George Carter, Boris Navinšek, James L. Whitton
    Pages 231-269

  9. Back Matter

    PDF
Back to top

Keywords

Back to top

Bibliographic Information

  • Book Title: Sputtering by Particle Bombardment II

  • Book Subtitle: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography

  • Editors: Rainer Behrish

  • Series Title: Topics in Applied Physics

  • DOI: https://doi.org/10.1007/3-540-12593-0

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1983

  • Softcover ISBN: 978-3-662-31169-1Published: 23 August 2014

  • eBook ISBN: 978-3-540-38659-9Published: 11 August 2005

  • Series ISSN: 0303-4216

  • Series E-ISSN: 1437-0859

  • Edition Number: 1

  • Number of Pages: XIII, 394

  • Topics: Solid State Physics, Spectroscopy and Microscopy

Back to top

Publish with us

Policies and ethics

Back to top
Access via your institution

Buy it now

Softcover Book USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Search

Navigation