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  • © 2005

Excimer Laser Technology

  • Written by leading authorities on the subject

  • One of the major laser sources in Physics, Chemistry and Medicine

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Table of contents (31 chapters)

  1. Front Matter

    Pages I-XIX
  2. Introductory Remarks

    • D. Basting, G. Marowsky
    Pages 1-7
  3. Historical Review of Excimer Laser Development

    • D. Basting, N. Djeu, K. Jain
    Pages 8-21
  4. Trends in Worldwide Excimer Laser Sales

    • Stephen G. Anderson
    Pages 22-29
  5. Fundamentals

    1. Some Fundamentals of Laser Physics

      • K. Körber, C. Kulik
      Pages 33-40
    2. Principles of Excimer Lasers

      • H. von Bergmann, U. Stamm
      Pages 41-45
    3. Design and Technology of Excimer Lasers

      • H. von Bergmann, U. Rebhan, U. Stamm
      Pages 47-73
    4. High-Repetition-Rate and High-Power Lasers

      • H. von Bergmann
      Pages 75-80
    5. High-Energy Lasers

      • V. Borisov, I. Bragin
      Pages 81-88
    6. Excimer Lasers for Microlithography

      • R. Pätzel, U. Stamm
      Pages 89-103
    7. Laser Beam Characterization

      • K. Mann
      Pages 105-117
    8. Optical Coatings for Excimer Laser Applications

      • N. Kaiser, H. Lauth, H. Bernitzki
      Pages 119-126
    9. Small Structures with Large Excimer Lasers

      • P. Oesterlin, A. Koch
      Pages 127-136
  6. Applications

    1. Overview

      • M. Wehner
      Pages 139-147
    2. Ablation

      • M Wehner
      Pages 149-154
    3. Micro-Machining

      • M. Wehner, J. Ihlemann
      Pages 155-186
    4. Via Drilling

      • M. Hessling, J. Ihlemann
      Pages 187-200
    5. Micro-Processing of Borosilicate Glass and Polymers

      • B. Keiper, T. Petsch, H. Exner
      Pages 201-219
    6. Nano-Structuring with Femtosecond Excimer Laser Pulses

      • J.-H. Klein-Wiele, J. Bekesi, J. Ihlemann, P. Simon
      Pages 279-283

About this book

 This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F laser technology. 

Additional chapters on optics, devices and laser systems complete this compact handbook.

A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

Reviews

From the reviews:

"This book is one of the few books devoted to excimer lasers and their applications. … anyone working in the field of lasers or materials processing can take advantage of it. The editor has done the effort to include a list of abbreviations and also an alphabetic register, which enhances the usefulness of the book. The quality of printing and layout is perfect." (Erik Stijns, Physicalia, Vol. 28 (4-6), 2006)

Editors and Affiliations

  • Fort Lauderdale, USA

    Dirk Basting

  • Laser-Laboratorium Göttingen e.V., Göttingen, Germany

    Gerd Marowsky

Bibliographic Information

Buy it now

Buying options

eBook USD 229.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 299.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 299.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access