Overview
First book offering comprehensive information on the diagnostics and measurement of microsystems or MEMS
Includes supplementary material: sn.pub/extras
Access this book
Tax calculation will be finalised at checkout
Other ways to access
Table of contents (6 chapters)
-
Front Matter
Keywords
About this book
Microscale Diagnostic Techniques highlights the most innovative and powerful developments in microscale diagnostics. It provides a resource for scientists and researchers interested in learning about the techniques themselves, including their capabilities and limitations. The fields of Micro- and Nanotechnology have emerged over the past decade as a major focus of modern scientific and engineering research and technology. Driven by advances in microfabrication, the investigation, manipulation and engineering of systems characterized by micrometer and, more recently, nanometer scales have become commonplace throughout all technical disciplines. With these developments, an entirely new collection of experimental techniques has been developed to explore and characterize such systems.
Editors and Affiliations
Bibliographic Information
Book Title: Microscale Diagnostic Techniques
Editors: Kenneth S. Breuer
DOI: https://doi.org/10.1007/b137604
Publisher: Springer Berlin, Heidelberg
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2005
Hardcover ISBN: 978-3-540-23099-1Published: 12 November 2004
Softcover ISBN: 978-3-642-06202-5Published: 14 October 2010
eBook ISBN: 978-3-540-26449-1Published: 06 December 2005
Edition Number: 1
Number of Pages: XII, 259
Topics: Electronics and Microelectronics, Instrumentation, Theoretical and Applied Mechanics, Measurement Science and Instrumentation, Electrical Engineering, Nanotechnology, Control, Robotics, Mechatronics