Overview
- Systematic manual of bulk silicon microtechniques
- Includes supplementary material: sn.pub/extras
Access this book
Tax calculation will be finalised at checkout
Other ways to access
Table of contents (8 chapters)
-
Front Matter
-
Back Matter
Keywords
About this book
This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.
Authors and Affiliations
Bibliographic Information
Book Title: Shape and Functional Elements of the Bulk Silicon Microtechnique
Book Subtitle: A Manual of Wet-Etched Silicon Structures
Authors: Joachim Frühauf
DOI: https://doi.org/10.1007/b138230
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2005
Hardcover ISBN: 978-3-540-22109-8Published: 12 October 2004
Softcover ISBN: 978-3-642-06048-9Published: 13 October 2010
eBook ISBN: 978-3-540-26876-5Published: 05 December 2005
Edition Number: 1
Number of Pages: XII, 222
Topics: Optical and Electronic Materials, Electronics and Microelectronics, Instrumentation, Ceramics, Glass, Composites, Natural Materials, Microwaves, RF and Optical Engineering, Industrial Chemistry/Chemical Engineering