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Sputtering by Particle Bombardment II

Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography

  • Book
  • © 1983

Overview

Editors:
  1. Rainer Behrish
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Part of the book series: Topics in Applied Physics (TAP, volume 52)

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Table of contents (7 chapters)

  1. Front Matter

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  2. Introduction and overview

    • Rainer Behrisch
    Pages 1-10

  3. Sputtering of multicomponent materials

    • Gerhard Betz, Gottfried K. Wehner
    Pages 11-90

  4. Chemical sputtering

    • Joachim Roth
    Pages 91-146

  5. Sputtering by electrons and photons

    • Peter C. Townsend
    Pages 147-178

  6. Sputtering of solids with neutrons

    • Rainer Behrisch
    Pages 179-229

  7. Heavy ion sputtering induced surface topography development

    • George Carter, Boris Navinšek, James L. Whitton
    Pages 231-269

  8. Development of surface topography due to gas ion implantation

    • Bernhard M. U. Scherzer
    Pages 271-355

  9. Back Matter

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Keywords

Bibliographic Information

  • Book Title: Sputtering by Particle Bombardment II

  • Book Subtitle: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography

  • Editors: Rainer Behrish

  • Series Title: Topics in Applied Physics

  • DOI: https://doi.org/10.1007/3-540-12593-0

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1983

  • Softcover ISBN: 978-3-662-31169-1Published: 23 August 2014

  • eBook ISBN: 978-3-540-38659-9Published: 11 August 2005

  • Series ISSN: 0303-4216

  • Series E-ISSN: 1437-0859

  • Edition Number: 1

  • Number of Pages: XIII, 394

  • Topics: Solid State Physics, Spectroscopy and Microscopy

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