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Sputtering by Particle Bombardment I

Physical Sputtering of Single-Element Solids

  • Book
  • © 1981

Overview

Editors:
  1. Rainer Behrisch
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Part of the book series: Topics in Applied Physics (TAP, volume 47)

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Table of contents (5 chapters)

  1. Front Matter

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  2. Introduction and overview

    • Rainer Behrisch
    Pages 1-8

  3. Sputtering by ion bombardment theoretical concepts

    • Peter Sigmund
    Pages 9-71

  4. Theoretical aspects of monocrystal sputtering

    • Mark T. Robinson
    Pages 73-144

  5. Sputtering yield measurements

    • Hans Henrik Andersen, Helge L. Bay
    Pages 145-218

  6. Sputtering yields of single crystalline targets

    • Hans E. Roosendaal
    Pages 219-256

  7. Back Matter

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Keywords

Bibliographic Information

  • Book Title: Sputtering by Particle Bombardment I

  • Book Subtitle: Physical Sputtering of Single-Element Solids

  • Editors: Rainer Behrisch

  • Series Title: Topics in Applied Physics

  • DOI: https://doi.org/10.1007/3-540-10521-2

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer-Verlag Berlin Heidelberg 1981

  • Softcover ISBN: 978-3-662-30888-2Published: 23 August 2014

  • eBook ISBN: 978-3-540-38514-1Published: 28 July 2005

  • Series ISSN: 0303-4216

  • Series E-ISSN: 1437-0859

  • Edition Number: 1

  • Number of Pages: XI, 284

  • Number of Illustrations: 19 b/w illustrations

  • Topics: Solid State Physics, Spectroscopy and Microscopy

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