Skip to main content
SpringerLink
Log in

Mikromechanik

Einführung in Technologie und Anwendungen

  • Textbook
  • © 1991

Overview

Authors:
  1. Stephanus Büttgenbach

    1. Hahn-Schickard-Institut für Mikro- und Informationstechnik, Villingen-Schwenningen, Deutschland

    View author publications

    You can also search for this author in PubMed   Google Scholar

Part of the book series: Angewandte Physik (ANPH)

This is a preview of subscription content, log in via an institution to check access.

Access this book

Log in via an institution
eBook USD 49.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 49.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access

Licence this eBook for your library

Institutional subscriptions

Table of contents (7 chapters)

  1. Front Matter

    Pages 1-15
    Download chapter PDF

  2. Bedeutung und Inhalte der Mikromechanik

    • Stephanus Büttgenbach
    Pages 17-20

  3. Werkstoffe der Mikromechanik

    • Stephanus Büttgenbach
    Pages 21-44

  4. Reinraumtechnik

    • Stephanus Büttgenbach
    Pages 45-55

  5. Technologie der Mikromechanik

    • Stephanus Büttgenbach
    Pages 56-143

  6. Meßmethoden

    • Stephanus Büttgenbach
    Pages 144-161

  7. Anwendungen der Mikromechanik

    • Stephanus Büttgenbach
    Pages 162-214

  8. Mikrosystemtechnik

    • Stephanus Büttgenbach
    Pages 215-220

  9. Back Matter

    Pages 221-240
    Download chapter PDF
Back to top

Keywords

Authors and Affiliations

  • Hahn-Schickard-Institut für Mikro- und Informationstechnik, Villingen-Schwenningen, Deutschland

    Stephanus Büttgenbach

Bibliographic Information

  • Book Title: Mikromechanik

  • Book Subtitle: Einführung in Technologie und Anwendungen

  • Authors: Stephanus Büttgenbach

  • Series Title: Angewandte Physik

  • DOI: https://doi.org/10.1007/978-3-322-92135-2

  • Publisher: Vieweg+Teubner Verlag Wiesbaden

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Fachmedien Wiesbaden 1991

  • Softcover ISBN: 978-3-519-03071-3Published: 01 November 1990

  • eBook ISBN: 978-3-322-92135-2Published: 17 April 2013

  • Edition Number: 1

  • Number of Pages: 240

  • Number of Illustrations: 44 b/w illustrations

  • Topics: Engineering, general

Publish with us

Policies and ethics

Back to top

Search

Navigation