Overview
- Eine Übersicht über die Zukunftstechnologie Mikrosystemtechnik
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Table of contents(6 chapters)
About this book
Reviews
Physik Journal, 04/2005
About the author
Bibliographic Information
Book Title: Mikrosystemtechnik
Book Subtitle: Konzepte und Anwendungen
Authors: Ulrich Mescheder
DOI: https://doi.org/10.1007/978-3-322-84878-9
Publisher: Vieweg+Teubner Verlag Wiesbaden
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eBook Packages: Springer Book Archive
Copyright Information: Vieweg + Teubner Verlag | Springer Fachmedien Wiesbaden GmbH 2004
Softcover ISBN: 978-3-519-16256-8
eBook ISBN: 978-3-322-84878-9
Edition Number: 2
Number of Pages: XII, 292
Topics: Electrical Engineering, Applied and Technical Physics, Mechatronics, Circuits and Systems, Electronics and Microelectronics, Instrumentation, Nanotechnology and Microengineering