Overview
- Nominated as an outstanding PhD thesis by Griffith University, Queensland, Australia
- Demonstrates the potential of the 3C-SiC polytype for microelectromechanical applications, especially in harsh conditions such as deep well drilling
- Includes novel results on SiC nanowires, which are also shown to be suited to mechanical sensing applications
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Theses (Springer Theses)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
Keywords
About this book
Silicon carbide (SiC) is an excellent material for electronic devices operating at high temperatures, thanks to its large energy band gap, superior mechanical properties and extreme chemical inertness. Among the numerous polytypes of SiC, the cubic single crystal, which is also well known as 3C-SiC, is the most promising platform for microelectromechanical (MEMS) applications, as it can be epitaxially grown on an Si substrate with diameters of up to several hundred millimeters. This feature makes 3C-SiC compatible with the conventional Si-based micro/nano processing and also cuts down the cost of SiC wafers.
The investigation into the piezoresistive effect in 3C-SiC is of significant interest for the development of mechanical transducers such as pressure sensors and strain sensors used for controlling combustion and deep well drilling. Although a number of studies have focused on the piezoresistive effect in n-type 3C-SiC, 4H-SiC and 6H-SiC, comparatively little attention has been paid to piezoresistance in p-type 3C-SiC.
In addition, the book investigates the piezoresistive effect of top-down fabricated SiC nanowires, revealing a high degree of sensitivity in nanowires employing an innovative nano strain-amplifier. The large gauge factors of the p-type 3C-SiC at both room temperature and high temperatures found here indicate that this polytype could be suitable for the development of mechanical sensing devices operating in harsh environments with high temperatures.
Authors and Affiliations
About the author
Bibliographic Information
Book Title: Piezoresistive Effect of p-Type Single Crystalline 3C-SiC
Book Subtitle: Silicon Carbide Mechanical Sensors for Harsh Environments
Authors: Hoang-Phuong Phan
Series Title: Springer Theses
DOI: https://doi.org/10.1007/978-3-319-55544-7
Publisher: Springer Cham
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG 2017
Hardcover ISBN: 978-3-319-55543-0Published: 24 April 2017
Softcover ISBN: 978-3-319-85690-2Published: 25 July 2018
eBook ISBN: 978-3-319-55544-7Published: 06 April 2017
Series ISSN: 2190-5053
Series E-ISSN: 2190-5061
Edition Number: 1
Number of Pages: XXI, 146
Number of Illustrations: 91 b/w illustrations, 3 illustrations in colour
Topics: Optical and Electronic Materials, Electronics and Microelectronics, Instrumentation, Solid State Physics