Overview
- Explains the interaction of nanascale structures and electrical and/or optical behavior of novel semiconductor devices, MEMS, and sensors
- Describes processes and materials needed to fabricate the nano devices discussed
- Discusses design, modeling and simulation for optimizing the performance of nanoscale devices
- Examines the effect of nanoscale structures on the reliability of nano devices
- Includes supplementary material: sn.pub/extras
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Table of contents (17 chapters)
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Front Matter
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MOS
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Front Matter
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Sensor
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Front Matter
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Other Nanoscale Devices
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Front Matter
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Keywords
About this book
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.
Editors and Affiliations
About the editors
Juin J. Liou received the B.S. (honors), M.S., and Ph.D. degrees in electrical engineering from the University of Florida, Gainesville, in 1982, 1983, and 1987, respectively. In 1987, he joined the Department of Electrical and Computer Engineering at the University of Central Florida (UCF), Orlando, Florida where he is now the Pegasus Distinguished Professor, Lockheed Martin St. Laurent Professor, and UCF-Analog Devices Fellow. His current research interests are Micro/nanoelectronics computer-aided design, RF device modeling and simulation, and electrostatic discharge (ESD) protection design, modeling and simulation. Dr. Liou holds 8 U.S. patents (3 more filed and pending), and has published 9 books, more than 260 journal papers (including 17 invited review articles), and more than 210 papers (including 90 keynote and invited papers) in international and national conference proceedings.
Bibliographic Information
Book Title: Outlook and Challenges of Nano Devices, Sensors, and MEMS
Editors: Ting Li, Ziv Liu
DOI: https://doi.org/10.1007/978-3-319-50824-5
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer International Publishing AG 2017
Hardcover ISBN: 978-3-319-50822-1Published: 01 March 2017
Softcover ISBN: 978-3-319-84500-5Published: 13 July 2018
eBook ISBN: 978-3-319-50824-5Published: 22 February 2017
Edition Number: 1
Number of Pages: XVI, 521
Number of Illustrations: 95 b/w illustrations, 272 illustrations in colour
Topics: Circuits and Systems, Electronic Circuits and Devices, Nanotechnology and Microengineering, Nanotechnology