Outlook and Challenges of Nano Devices, Sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.

• FinFET devices
• Nanoscale MEMS
• Nanoscale MOS devices
• Nanoscale semiconductor devices
• Nanoscale sensors

• State Key Lab of Electronic Thin Film & Integrated Device, University of Electronic Science & Technology of China, Chengdu, China

  Ting Li

• Microelectronics & Solid-state Electronics College, University of Electronic Science & Technology of China, Chengdu, China

  Ziv Liu

Juin J. Liou received the B.S. (honors), M.S., and Ph.D. degrees in electrical engineering from the University of Florida, Gainesville, in 1982, 1983, and 1987, respectively. In 1987, he joined the Department of Electrical and Computer Engineering at the University of Central Florida (UCF), Orlando, Florida where he is now the Pegasus Distinguished Professor, Lockheed Martin St. Laurent Professor, and UCF-Analog Devices Fellow. His current research interests are Micro/nanoelectronics computer-aided design, RF device modeling and simulation, and electrostatic discharge (ESD) protection design, modeling and simulation. Dr. Liou holds 8 U.S. patents (3 more filed and pending), and has published 9 books, more than 260 journal papers (including 17 invited review articles), and more than 210 papers (including 90 keynote and invited papers) in international and national conference proceedings.

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