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Metrology and Physical Mechanisms in New Generation Ionic Devices

  • Book
  • © 2016

Overview

Authors:
  1. Umberto Celano

    1. Material and Component Analysis, imec, Leuven, Belgium

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  • Nominated as an outstanding PhD thesis by the KU Leuven and Imec, Belgium
  • Presents a valuable new Scanning Probe Microscopy concept
  • Represents an important step forward in 3D metrology
  • Author awarded the Roger A. Haken Best Paper Award at the International Electron Devices Meeting (IEDM) 2013
  • Includes supplementary material: sn.pub/extras

Part of the book series: Springer Theses (Springer Theses)

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Table of contents (7 chapters)

  1. Front Matter

    Pages i-xxiv
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  2. Introduction

    • Umberto Celano
    Pages 1-9

  3. Filamentary-Based Resistive Switching

    • Umberto Celano
    Pages 11-45

  4. Nanoscaled Electrical Characterization

    • Umberto Celano
    Pages 47-86

  5. Conductive Filaments: Formation, Observation and Manipulation

    • Umberto Celano
    Pages 87-113

  6. Three-Dimensional Filament Observation

    • Umberto Celano
    Pages 115-142

  7. Reliability Threats in CBRAM

    • Umberto Celano
    Pages 143-150

  8. Conclusions and Outlook

    • Umberto Celano
    Pages 151-160

  9. Back Matter

    Pages 161-175
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Keywords

About this book

This thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed. 






Authors and Affiliations

  • Material and Component Analysis, imec, Leuven, Belgium

    Umberto Celano

About the author

Umberto Celano received a M.Sc. degree in Nanoelectronics from the University of Rome ``Sapienza'', Italy and a Ph.D. degree in Physics from the KU Leuven, Belgium in 2011 and 2015 respectively. Currently, he is a researcher in the material and component analysis group of imec in Belgium. Umberto's research interests include nanometer scale issues in materials, emerging nanoelectronics and physical characterization. His goal is to explore methods and novel metrology techniques that enable the understanding of the physics in nanomaterials and nanoelectronics devices.

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