Authors:
- Nominated as an outstanding PhD thesis by the KU Leuven and Imec, Belgium
- Presents a valuable new Scanning Probe Microscopy concept
- Represents an important step forward in 3D metrology
- Author awarded the Roger A. Haken Best Paper Award at the International Electron Devices Meeting (IEDM) 2013
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Theses (Springer Theses)
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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Material and Component Analysis, imec, Leuven, Belgium
Umberto Celano
About the author
Bibliographic Information
Book Title: Metrology and Physical Mechanisms in New Generation Ionic Devices
Authors: Umberto Celano
Series Title: Springer Theses
DOI: https://doi.org/10.1007/978-3-319-39531-9
Publisher: Springer Cham
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer International Publishing Switzerland 2016
Hardcover ISBN: 978-3-319-39530-2Published: 24 June 2016
Softcover ISBN: 978-3-319-81906-8Published: 07 June 2018
eBook ISBN: 978-3-319-39531-9Published: 18 June 2016
Series ISSN: 2190-5053
Series E-ISSN: 2190-5061
Edition Number: 1
Number of Pages: XXIV, 175
Number of Illustrations: 78 b/w illustrations, 18 illustrations in colour
Topics: Spectroscopy and Microscopy, Nanotechnology and Microengineering, Characterization and Evaluation of Materials